MICROFABRICATED SUBMICRON AL-FILAMENT BIPRISM AS APPLIED TO ELECTRON HOLOGRAPHY

被引:5
作者
OGAI, K [1 ]
KIMURA, Y [1 ]
SHIMIZU, R [1 ]
ISHIBASHI, K [1 ]
AOYAGI, Y [1 ]
NAMBA, S [1 ]
机构
[1] RIKEN,FRONTIER RES PROGRAM,WAKO,SAITAMA 35301,JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1991年 / 30卷 / 11B期
关键词
ELECTRON HOLOGRAPHY; ELECTRON BIPRISM; AL-FILAMENT; SILICON NITRIDE MEMBRANE; MULTI-BIPRISM; LOCAL ELECTRIC FIELD;
D O I
10.1143/JJAP.30.3272
中图分类号
O59 [应用物理学];
学科分类号
摘要
A novel type of electron blprism was made using a microprocess technique. This electron biprism is composed of several filaments lined in parallel on a silicon nitride membrane. Using this type of multi-biprism, we observed an electric field by electron interferometry and confirmed the potentiality of extending this technique to a local electric field.
引用
收藏
页码:3272 / 3276
页数:5
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HARADA K, 1988, J ELECTRON MICROSC, V37, P199
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OHSHITA A, 1984, ULTRAMICROSCOPY, V12, P247, DOI 10.1016/0304-3991(83)90266-8