HYDROGEN LOSS FROM LASER-ANNEALED AMORPHOUS HYDROGENATED CARBON-FILMS STUDIED BY SECONDARY-ION MASS-SPECTROMETRY

被引：9

作者：

ARMEYEV, VY

LOUBNIN, EN

RALCHENKO, VG

STRELNITSKY, VE

机构：

[1] General Physics Institute of the USSR Academy of Sciences, Moscow 117942

来源：

APPLIED PHYSICS LETTERS | 1991年 / 58卷 / 24期

关键词：

D O I：

10.1063/1.104777

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Secondary-ion mass spectrometry was used to measure the amount of hydrogen retained in dense (rho = 2.4 g/cm3) amorphous hydrogenated carbon films subjected to Ar+ laser annealing in intensity range I = (1-6) X 10(5) W/cm2. Hydrogen effusion, accelerating with laser power, is accompanied by a decrease of the film density and strengthening of the carbon skeleton that is interpreted as a transformation of the film from amorphous to a graphite-like state.

引用

页码：2758 / 2760

页数：3

共 20 条

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[2]

[Anonymous], 1987, SURF INTERFACE ANAL

[3]

ARMEYEV VY, 1990, 5 LEB I REP, P17

[4]

ARMEYEV VY, 1990, P SOC PHOTO-OPT INS, V1352, P200