REDUCED AL/PTSI REACTION UP TO 600-DEGREES-C USING AN AMORPHOUS-CARBON BARRIER LAYER

被引：4

作者：

CHANG, CA

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 10期

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D O I：

10.1063/1.343741

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：5104 / 5106

页数：3

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