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FORMATION OF PTSI IN THE PRESENCE OF AL

被引：8
作者：
CHANG, CA
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 05期
关键词：
D O I：
10.1063/1.338031
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：1864 / 1868
页数：5
相关论文
共 37 条
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[2]   PTSI CONTACT METALLURGY USING ELECTRON-BEAM EVAPORATED PT FILMS AND DIFFERENT ANNEALING PROCESSES [J].
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