CORROSION RESISTANCE OF SEVERAL INTEGRATED-CIRCUIT METALLIZATION SYSTEMS

[1] BERRY RW, 1968, THIN FILM TECHNOLOGY, P273

[2] BRAUER JB, 1970, 8 ANN REL PHYS S LAS

[3] Cunningham J. A., 1969, Ohmic contacts to semiconductors, P299

[4] CUNNINGHAM JA, 1967, EL SOC EXT ABSTR, V4, P24

[5] EYNON RT, 1968, EL SOC EXT ABSTR, V5, P245

[6] GHATE PB, 1969, 1969 AIME M PHIL

[7] BEAM-LEAD TECHNOLOGY [J]. BELL SYSTEM TECHNICAL JOURNAL, 1966, 45 (02): : 233 - &

[8] SCHNABLE GL, 1967, 6 ANN REL PHYS S LOS, P170

[9] METALLIZATION SYSTEMS FOR SILICON INTEGRATED CIRCUITS [J]. PROCEEDINGS OF THE IEEE, 1969, 57 (09) : 1580 - &

[10] SLT DEVICE METALLURGY AND ITS MONOLITHIC EXTENSION [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1969, 13 (03) : 226 - &

[1] BERRY RW, 1968, THIN FILM TECHNOLOGY, P273

[2] BRAUER JB, 1970, 8 ANN REL PHYS S LAS

[3] Cunningham J. A., 1969, Ohmic contacts to semiconductors, P299

[4] CUNNINGHAM JA, 1967, EL SOC EXT ABSTR, V4, P24

[5] EYNON RT, 1968, EL SOC EXT ABSTR, V5, P245

[6] GHATE PB, 1969, 1969 AIME M PHIL

[7] BEAM-LEAD TECHNOLOGY [J]. BELL SYSTEM TECHNICAL JOURNAL, 1966, 45 (02): : 233 - &

[8] SCHNABLE GL, 1967, 6 ANN REL PHYS S LOS, P170

[9] METALLIZATION SYSTEMS FOR SILICON INTEGRATED CIRCUITS [J]. PROCEEDINGS OF THE IEEE, 1969, 57 (09) : 1580 - &

[10] SLT DEVICE METALLURGY AND ITS MONOLITHIC EXTENSION [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1969, 13 (03) : 226 - &