X-RAY AND OPTICAL CHARACTERIZATION OF 3 GROWTH MORPHOLOGIES OF CVD DIAMOND FILMS

Using X-ray texture measurements and optical goniometry, we have determined the texture and facet orientation of diamond films grown by CVD with three distinct morphologies. The first morphology has {111} and {100} facets and a <110> texture which is attributed to preferential growth as the result of rapid nucleation of atomic layers at {111} twin boundaries. The second morphology has {100} facets and a <1730> texture which may be due to the influence of surface diffusion on growth competition. The third morphology has {111} facets and a <100> texture which is attributed to competition of uniformly growing grains.