TOWARD QUANTIFICATION OF THIN-FILM MORPHOLOGY

被引:182
作者
MESSIER, R
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 03期
关键词
D O I
10.1116/1.573866
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:490 / 495
页数:6
相关论文
共 36 条
  • [1] STUDIES OF SURFACE, THIN-FILM AND INTERFACE PROPERTIES BY AUTOMATIC SPECTROSCOPIC ELLIPSOMETRY
    ASPNES, DE
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (02): : 289 - 295
  • [2] MULTIPLE ANALYSIS OF AN UNKNOWN OPTICAL MULTILAYER COATING
    BARTELLA, J
    BERNING, PH
    BOVARD, B
    CARNIGLIA, CK
    CASPARIS, E
    COSTICH, VR
    DOBROWOLSKI, JA
    GIBSON, UJ
    HERRMANN, R
    HO, FC
    JACOBSON, MR
    KLINGER, RE
    LEAVITT, JA
    LOTZ, HG
    MACLEOD, HA
    MESSERLY, MJ
    MITCHELL, DF
    MUENZ, WD
    NEBESNY, KW
    PFEFFERKORN, R
    SAXE, SG
    SONG, DY
    SWAB, P
    SWENSON, RM
    THOENI, W
    VANMILLIGEN, F
    VINCENT, S
    WALDORF, A
    [J]. APPLIED OPTICS, 1985, 24 (16) : 2625 - 2646
  • [3] SURFACE STUDIES BY SCANNING TUNNELING MICROSCOPY
    BINNING, G
    ROHRER, H
    GERBER, C
    WEIBEL, E
    [J]. PHYSICAL REVIEW LETTERS, 1982, 49 (01) : 57 - 61
  • [4] BLANCO JR, 1985, THESIS PENNSYLVANIA
  • [5] BLANCO JR, 1985, MATER RES SOC S P, V38, P301
  • [6] RECONSTRUCTION OF 3 DIMENSIONAL STRUCTURES FROM ELECTRON MICROGRAPHS
    DEROSIER, DJ
    KLUG, A
    [J]. NATURE, 1968, 217 (5124) : 130 - &
  • [7] COLUMNAR MICROSTRUCTURE IN VAPOR-DEPOSITED THIN-FILMS
    DIRKS, AG
    LEAMY, HJ
    [J]. THIN SOLID FILMS, 1977, 47 (03) : 219 - 233
  • [8] Giri A. P., 1984, MATER RES SOC S P, V24, P221
  • [9] GUENTHER KH, 1982, P SPIE, V246, P9
  • [10] SIMULATION OF STRUCTURAL ANISOTROPY AND VOID FORMATION IN AMORPHOUS THIN-FILMS
    HENDERSON, D
    BRODSKY, MH
    CHAUDHARI, P
    [J]. APPLIED PHYSICS LETTERS, 1974, 25 (11) : 641 - 643