PLASMA TRANSPORT IN A NEW CATHODIC ARC ION-SOURCE - THEORY AND EXPERIMENT

被引：17

作者：

BOERCKER, DB

FALABELLA, S

SANDERS, DM

机构：

[1] Lawrence Livermore National Laboratory, Livermore

来源：

SURFACE & COATINGS TECHNOLOGY | 1992年 / 53卷 / 03期

关键词：

D O I：

10.1016/0257-8972(92)90382-K

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We have developed a plasma transport code based upon the "flux tube" model and applied it to the ion transport in a recently developed metal-ion source based on the cathodic vacuum arc. This model is compared with ion current measurements made at various locations within the source. The agreement is sufficient to justify use of this model for future arc source design.

引用

页码：239 / 242

页数：4

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