LARGE AREA PIEZOELECTRIC ZNO FILM TRANSDUCERS PRODUCED BY RF DIODE SPUTTERING

被引：30

作者：

AEUGLE, T

BIALAS, H

HENEKA, K

PLEYER, W

机构：

[1] Abt. Festkörperphysik, Universität Ulm, Ulm

来源：

THIN SOLID FILMS | 1991年 / 201卷 / 02期

关键词：

D O I：

10.1016/0040-6090(91)90118-H

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Large area ZnO film transducers (15 mm x 45 mm) have been grown on c-cut sapphire by r.f. diode sputtering. With substrate temperature T(s) > 150-degrees-C the films grow epitaxially. Below T(s) = 100-degrees-C the films grow textured (c axis perpendicular to the surface). Both textured and epitaxial films are homogeneous across the whole area and have been used for sound beam topography at frequencies up to 35 GHz. After annealing at 620-degrees-C, a cubic modification of ZnO is observed in a surface layer at least 5 nm thick. Its lattice parameter is a = 0.375 nm.

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页码：293 / 304

页数：12

相关论文

共 26 条

[1] NEW HIGH-PRESSURE POLYMORPH OF ZINC OXIDE [J].

BATES, CH ;

ROY, R ;

WHITE, WB .

SCIENCE, 1962, 137 (3534) :993-&

[2] EXCITATION OF VERY-HIGH-FREQUENCY SOUND IN QUARTZ [J].

BOMMEL, HE ;

DRANSFELD, K .

PHYSICAL REVIEW LETTERS, 1958, 1 (07) :234-236

[3] SCATTERING IN ZNO-SAPPHIRE OPTICAL-WAVEGUIDES [J].

CHANNIN, DJ ;

HAMMER, JM ;

DUFFY, MT .

APPLIED OPTICS, 1975, 14 (04) :923-930

[4] THIN FILM ZINC OXIDE TRANSDUCERS FOR USE IN MICROWAVE DEVICES [J].

DEKLERK, J .

ULTRASONICS, 1970, 8 (03) :159-&

[5] MULTILAYER THIN FILM PIEZOELECTRIC TRANSDUCERS [J].

DEKLERK, J .

IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1966, SU13 (03) :99-+

[6] PROPERTIES OF ZNO FILMS DEPOSITED ONTO INP BY SPRAY PYROLYSIS [J].

EBERSPACHER, C ;

FAHRENBRUCH, AL ;

BUBE, RH .

THIN SOLID FILMS, 1986, 136 (01) :1-10

[7] SOUND-BEAM TOPOGRAPHY OF CRYSTAL DEFECTS [J].

EDEL, H ;

BIALAS, H ;

WEIS, O .

ZEITSCHRIFT FUR PHYSIK B-CONDENSED MATTER, 1986, 64 (04) :437-445

[8] CRYSTALLOGRAPHIC ORIENTATION OF ZINC OXIDE FILMS DEPOSITED BY TRIODE SPUTTERING [J].

FOSTER, NF .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1969, 6 (01) :111-&

[9] EPITAXIAL ZNO ON SAPPHIRE [J].

GALLI, G ;

COKER, JE .

APPLIED PHYSICS LETTERS, 1970, 16 (11) :439-&

[10] HIGH-EFFICIENCY, MULTIPLE LAYER ZNO ACOUSTIC TRANSDUCERS AT MILLIMETER-WAVE FREQUENCIES [J].

HADIMIOGLU, B ;

LACOMB, LJ ;

WRIGHT, DR ;

KHURIYAKUB, BT ;

QUATE, CF .

APPLIED PHYSICS LETTERS, 1987, 50 (23) :1642-1644