STUDY OF CU-1 CU-2 CU-3 AND CU-(+) CU-2(+) CU-3(+) CLUSTER FORMATION UNDER ION-BOMBARDMENT

Yields and energy spectra of neutral and charged particles sputtered from Cu target under 5.5 keV Ar+ ion bombardment have been measured. The yield of Cun neutrals falls off rapidly with increasing n that can be explained by the recombination model. The yield of Cun+ ions depends unmonotonously on n. The ionization probability of sputtered particles is described by an exponential dependence exp[−(In−φ)/υ0] where In is the ionization potential of Cun cluster, q is the work function and e0 is a parameter. © 1991, Taylor & Francis Group, LLC. All rights reserved.