PRESSURE-DEPENDENCE OF ELECTRON-TEMPERATURE USING RF-FLOATED ELECTROSTATIC PROBES IN RF PLASMAS

被引：30

作者：

CANTIN, A ^{[1
]}

GAGNE, RRJ ^{[1
]}

机构：

[1] UNIV LAVAL,DEPT ELECT ENGN,QUEBEC CITY 10,QUEBEC,CANADA

来源：

关键词：

D O I：

10.1063/1.89406

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：316 / 319

页数：4

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[12] MEASURED NOISE TEMPERATURE VERSUS THEORETICAL ELECTRON TEMPERATURE FOR GAS DISCHARGE NOISE SOURCES
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[J]. IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1968, MT16 (09) : 640 - +
[13] PEEL KM, 1968, AIAA J, V6, P1433
[14] ELECTRON TEMPERATURE MEASUREMENTS IN A RADIO FREQUENCY GAS DISCHARGE
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[J]. PHYSICA, 1967, 34 (02): : 310 - &
[15] Seeliger R, 1931, ANN PHYS-BERLIN, V11, P817