EXPLORATION OF SCATTERING FROM TOPOGRAPHY WITH MASSIVELY PARALLEL COMPUTERS

被引：9

作者：

GAMELIN, J ^{[1
]}

GUERRIERI, R ^{[1
]}

NEUREUTHER, AR ^{[1
]}

机构：

[1] UNIV BOLOGNA,DIPARIMENTO ELETTR,I-40136 BOLOGNA,ITALY

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 06期

关键词：

D O I：

10.1116/1.584662

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1984 / 1990

页数：7

共 18 条

[1] ALIGNMENT ERRORS FROM RESIST COATING TOPOGRAPHY [J].

BOBROFF, N ;

ROSENBLUTH, A .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (01) :403-408

[2]

Born M., 1968, PRINCIPLES OPTICS

[3]

Brown T., 1988, Proceedings of the SPIE - The International Society for Optical Engineering, V920, P390, DOI 10.1117/12.968340

[4]

BURKHARDT CB, 1966, J OPT SOC AM, V56, P1502

[5] MODELING PROJECTION PRINTING OF POSITIVE PHOTORESISTS [J].

DILL, FH ;

NEUREUTHER, AR ;

TUTTLE, JA ;

WALKER, EJ .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1975, ED22 (07) :456-464

[6]

Gallatin G. M., 1987, Proceedings of the SPIE - The International Society for Optical Engineering, V772, P193, DOI 10.1117/12.967050

[7]

GAMELIN J, 1989, THESIS U CALIFORNIA

[8] NUMERICAL METHOD FOR ANALYSIS OF DIFFRACTION GRATINGS [J].

KALHOR, HA ;

NEUREUTHER, AR .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (01) :43-+

[9]

Kirk C. P., 1987, Proceedings of the SPIE - The International Society for Optical Engineering, V772, P134, DOI 10.1117/12.967042

[10]

MACK CA, 1985, P SOC PHOTO-OPT INST, V538, P207

← 1 2 →