GAS-FLOW DYNAMICS IN LASER ABLATION DEPOSITION

被引:162
作者
KOOLS, JCS
BALLER, TS
DEZWART, ST
DIELEMAN, J
机构
[1] Philips Research Laboratories, 5600 JA Eindhoven
关键词
D O I
10.1063/1.350772
中图分类号
O59 [应用物理学];
学科分类号
摘要
The gas flow dynamics of laser ablation plumes is investigated experimentally and theoretically. Experimentally, angular-resolved time-of-flight (ARTOF) measurements are performed on a model system (laser etching of copper in a chlorine environment). The TOF spectra obtained can be fitted by elliptical Maxwell-Boltzmann distributions on a stream velocity. Theoretically, an analytical model is constructed, based on the hydrodynamical problem of an expanding elliptical gas cloud. The model allows semiquantitative prediction of ARTOF distributions and angular intensity distributions. Observed trends in laser ablation deposition such as independence of the angular intensity distribution on mass of the atom and laser fluence, and dependence of the angular distribution on spot dimensions are explained.
引用
收藏
页码:4547 / 4556
页数:10
相关论文
共 64 条