PREPARATION OF YBA2CU3OY SUPERCONDUCTING THIN-FILMS BY RADIOFREQUENCY PLASMA FLASH EVAPORATION APPARATUS

被引：3

作者：

KOMORI, K ^{[1
]}

FUKAGAWA, W ^{[1
]}

FUKUTOMI, M ^{[1
]}

TANAKA, Y ^{[1
]}

ASANO, T ^{[1
]}

MAEDA, H ^{[1
]}

HOSOKAWA, N ^{[1
]}

机构：

[1] ANELVA CORP,FUCHU,TOKYO 183,JAPAN

来源：

PHASE TRANSITIONS | 1993年 / 42卷 / 1-2期

关键词：

YBA2CU3OY; SUPERCONDUCTING THIN FILM; HIGH-TEMPERATURE PLASMA; PLASMA FLASH EVAPORATION; ATOMIC OXYGEN;

D O I：

10.1080/01411599308203503

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

We have attempted to deposit YBa2Cu3Oy oxide superconducting thin films using low-pressure plasma flash evaporation. The RF plasmas used were sustained at 20-30 Torr by a 13.56 MHz RF generator operated at 8-10 kW. We have obtained dense and shiny films at a deposition rate of about 10 Angstrom/s. The best film on MgO(100) substrate showed a sharp resistive transition with T-c(resistivity; p = 0) as high as 91 K and J(c) of 4.3 x 10(4) A/cm(2) at 77 K and zero field.

引用

页码：117 / 122

页数：6

共 9 条

[1] PREPARATION OF Y-BA-CU-O SUPERCONDUCTING THIN-FILMS BY THE MIST MICROWAVE PLASMA DECOMPOSITION METHOD [J].