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HYDROGENATED AMORPHOUS-SILICON PRODUCED BY PYROLYSIS OF DISILANE IN A HOT WALL REACTOR

被引：14
作者：
ASHIDA, Y
MISHIMA, Y
HIROSE, M
OSAKA, Y
KOJIMA, K
机构：
[1] HIROSHIMA UNIV,DEPT ELECT ENGN,HIGASHIHIROSHIMA 724,JAPAN
[2] HIROSHIMA UNIV,FAC INTEGRATED ARTS & SCI,HIROSHIMA 730,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1984年 / 23卷 / 03期
关键词：
D O I：
10.1143/JJAP.23.L129
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：L129 / L131
页数：3
相关论文
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