MEASUREMENT OF EPITAXIAL FILM THICKNESS USING AN INFRARED ELLIPSOMETER

[1] DETERMINATION OF PROPERTIES OF FILMS ON SILICON BY METHOD OF ELLIPSOMETRY [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1962, 52 (09) : 970 - &

[2] THE WIRE GRID AS A NEAR-INFRARED POLARIZER [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1960, 50 (09) : 886 - 891

[3] GROVES WO, 1962, SEMICONDUCTOR PRODUC, P25

[4] INFRARED LATTICE REFLECTION SPECTRA OF III-V COMPOUND SEMICONDUCTORS [J]. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1962, 23 (AUG) : 1099 - +

[5] KOHN AH, 1955, PHYS REV, V97, P1647

[6] LYDEN HA, 1964, PHYS REV, V134, P1106

[7] MCCRACKIN FL, 1963, J RESEARCH NAT BUR S, VA 67

[8] MCCRACKIN FL, 1964, 242 NAT BUR STAND TE

[9] Moss TS., 1959, OPTICAL PROPERTIES S

[10] FAR-INFRARED PROPERTIES OF QUARTZ AND SAPPHIRE [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1962, 52 (09) : 1023 - &

[1] DETERMINATION OF PROPERTIES OF FILMS ON SILICON BY METHOD OF ELLIPSOMETRY [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1962, 52 (09) : 970 - &

[2] THE WIRE GRID AS A NEAR-INFRARED POLARIZER [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1960, 50 (09) : 886 - 891

[3] GROVES WO, 1962, SEMICONDUCTOR PRODUC, P25

[4] INFRARED LATTICE REFLECTION SPECTRA OF III-V COMPOUND SEMICONDUCTORS [J]. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1962, 23 (AUG) : 1099 - +

[5] KOHN AH, 1955, PHYS REV, V97, P1647

[6] LYDEN HA, 1964, PHYS REV, V134, P1106

[7] MCCRACKIN FL, 1963, J RESEARCH NAT BUR S, VA 67

[8] MCCRACKIN FL, 1964, 242 NAT BUR STAND TE

[9] Moss TS., 1959, OPTICAL PROPERTIES S

[10] FAR-INFRARED PROPERTIES OF QUARTZ AND SAPPHIRE [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1962, 52 (09) : 1023 - &