ROUGHNESS IN NB/CU MULTILAYERS DETERMINED BY X-RAY-DIFFRACTION AND ATOMIC-FORCE MICROSCOPY

被引：35

作者：

TEMST, K ^{[1
]}

VANBAEL, MJ ^{[1
]}

WUYTS, B ^{[1
]}

VANHAESENDONCK, C ^{[1
]}

BRUYNSERAEDE, Y ^{[1
]}

DEGROOT, DG ^{[1
]}

KOEMAN, N ^{[1
]}

GRIESSEN, R ^{[1
]}

机构：

[1] VRIJE UNIV AMSTERDAM,FAC NAT & STERRENKUNDE,1081 HV AMSTERDAM,NETHERLANDS

来源：

APPLIED PHYSICS LETTERS | 1995年 / 67卷 / 23期

关键词：

D O I：

10.1063/1.115269

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Nb/Cu multilayers grown by molecular beam epitaxy have been studied by x-ray diffraction and atomic force microscopy. X-ray diffraction provides the average interface roughness while atomic force microscopy shows the roughness and topology of the upper surface. Comparison of both methods shows that high-angle diffraction averages over a lateral length which is in good agreement with the typical grain size. (C) 1995 American Institute of Physics.

引用

页码：3429 / 3431

页数：3

共 7 条

[1]

DHEZ P, 1988, PHYSICS FABRICATION

[2] STRUCTURAL REFINEMENT OF SUPERLATTICES FROM X-RAY-DIFFRACTION [J].

FULLERTON, EE ;

SCHULLER, IK ;

VANDERSTRAETEN, H ;

BRUYNSERAEDE, Y .

PHYSICAL REVIEW B, 1992, 45 (16) :9292-9310

[3] INTERFACIAL ROUGHNESS OF SPUTTERED MULTILAYERS - NB/SI [J].

FULLERTON, EE ;

PEARSON, J ;

SOWERS, CH ;

BADER, SD ;

WU, XZ ;

SINHA, SK .

PHYSICAL REVIEW B, 1993, 48 (23) :17432-17444

[4] SCANNING TUNNELING MICROSCOPY OBSERVATION OF SELF-AFFINE FRACTAL ROUGHNESS IN ION-BOMBARDED FILM SURFACES [J].

KRIM, J ;

HEYVAERT, I ;

VANHAESENDONCK, C ;

BRUYNSERAEDE, Y .

PHYSICAL REVIEW LETTERS, 1993, 70 (01) :57-60

[5]

SCHULLER IK, 1990, MRS BULL, V25, P29

[6] X-RAY AND NEUTRON-SCATTERING FROM ROUGH SURFACES [J].

SINHA, SK ;

SIROTA, EB ;

GAROFF, S ;

STANLEY, HB .

PHYSICAL REVIEW B, 1988, 38 (04) :2297-2311

[7] REFLECTIVITY USING NEUTRONS OR X-RAYS - A CRITICAL COMPARISON [J].

SINHA, SK .

PHYSICA B, 1991, 173 (1-2) :25-34

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