MONOLITHIC INTEGRATION OF MULTILAYER FILTER ON VERTICAL SURFACE OF SEMICONDUCTOR SUBSTRATE BY A BIAS-SPUTTERING TECHNIQUE

被引：8

作者：

BABA, T

TAMURA, S

KOKUBUN, Y

WATANABE, S

机构：

[1] Division of Electrical and Computer Engineering, Yokohama National University, Hodogayaku, Yokohama 240

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1990年 / 2卷 / 03期

关键词：

D O I：

10.1109/68.50886

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A bias-sputtering technique was developed to form thin films selectively on a vertical surface of the substrate. The monolithic integration of multilayer optical filter made by this technique and a waveguide-type photodector was demonstrated. A high-performance integrated device of demultiplexer and photodetector will be possible by integrating optical waveguides. © 1990 IEEE

引用

页码：191 / 193

页数：3

共 6 条

[1] MONOLITHIC INTEGRATION OF AN ARROW-TYPE DEMULTIPLEXER AND PHOTODETECTOR IN THE SHORTER WAVELENGTH REGION [J].