CHARACTERIZATION OF TUNGSTEN-RELATED DEEP LEVELS IN BULK SILICON CRYSTAL

[1] PRECIPITATION-INDUCED CURRENTS AND GENERATION-RECOMBINATION CURRENTS IN INTENTIONALLY CONTAMINATED SILICON P+N JUNCTIONS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (09) : 1424 - 1429

[2] TITANIUM IN SILICON AS A DEEP LEVEL IMPURITY [J]. SOLID-STATE ELECTRONICS, 1979, 22 (09) : 801 - 808

[3] NONDESTRUCTIVE CHARACTERIZATION OF DEEP LEVELS IN SEMIINSULATING GAAS WAFERS USING MICROWAVE IMPEDANCE MEASUREMENT [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1986, 25 (11): : L874 - L877

[4] ITOH K, 1984, ISSCC, P282

[5] DEEP-LEVEL TRANSIENT SPECTROSCOPY - NEW METHOD TO CHARACTERIZE TRAPS IN SEMICONDUCTORS [J]. JOURNAL OF APPLIED PHYSICS, 1974, 45 (07) : 3023 - 3032

[6] Lau C. K., 1982, International Electron Devices Meeting. Technical Digest, P714

[7] ONE-MICRON POLYCIDE (WSI2 ON POLY-SI) - MOSFET TECHNOLOGY [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (10) : 2207 - 2214

[8] ZIBUTS YA, 1967, FIZ TVERD TELA+, V8, P2041

[9] ZIBUTS YA, 1964, SOV PHYS-SOL STATE, V5, P2416

[1] PRECIPITATION-INDUCED CURRENTS AND GENERATION-RECOMBINATION CURRENTS IN INTENTIONALLY CONTAMINATED SILICON P+N JUNCTIONS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (09) : 1424 - 1429

[2] TITANIUM IN SILICON AS A DEEP LEVEL IMPURITY [J]. SOLID-STATE ELECTRONICS, 1979, 22 (09) : 801 - 808

[3] NONDESTRUCTIVE CHARACTERIZATION OF DEEP LEVELS IN SEMIINSULATING GAAS WAFERS USING MICROWAVE IMPEDANCE MEASUREMENT [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1986, 25 (11): : L874 - L877

[4] ITOH K, 1984, ISSCC, P282

[5] DEEP-LEVEL TRANSIENT SPECTROSCOPY - NEW METHOD TO CHARACTERIZE TRAPS IN SEMICONDUCTORS [J]. JOURNAL OF APPLIED PHYSICS, 1974, 45 (07) : 3023 - 3032

[6] Lau C. K., 1982, International Electron Devices Meeting. Technical Digest, P714

[7] ONE-MICRON POLYCIDE (WSI2 ON POLY-SI) - MOSFET TECHNOLOGY [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (10) : 2207 - 2214

[8] ZIBUTS YA, 1967, FIZ TVERD TELA+, V8, P2041

[9] ZIBUTS YA, 1964, SOV PHYS-SOL STATE, V5, P2416