A STUDY OF IMPURITY MOBILITY IN ION-IMPLANTED AL BY RUTHERFORD BACKSCATTERING

被引:1
作者
MADAKSON, PB
机构
来源
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 218卷 / 1-3期
关键词
D O I
10.1016/0167-5087(83)91037-2
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:537 / 541
页数:5
相关论文
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