INFLUENCE OF PROCESS CONDITIONS ON THE ELECTRICAL AND OPTICAL-PROPERTIES OF RF MAGNETRON SPUTTERED MOS2 FILMS

被引：24

作者：

BICHSEL, R

LEVY, F

机构：

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1986年 / 19卷 / 09期

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D O I：

10.1088/0022-3727/19/9/025

中图分类号：

O59 [应用物理学];

学科分类号：

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页码：1809 / &

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[1] ELECTRICAL AND OPTICAL-PROPERTIES OF MOSE2 FILMS PREPARED BY RF MAGNETRON SPUTTERING
BICHSEL, R
LEVY, F
[J]. THIN SOLID FILMS, 1985, 124 (01) : 75 - 83
[2] MORPHOLOGICAL AND COMPOSITIONAL PROPERTIES OF MOSE2 FILMS PREPARED BY RF MAGNETRON SPUTTERING
BICHSEL, R
LEVY, F
[J]. THIN SOLID FILMS, 1984, 116 (04) : 367 - 372
[3] BICHSEL R, 1986, J PHYS D, V19
[4] SPUTTERED MOS2 LUBRICANT COATING IMPROVEMENTS
CHRISTY, RI
[J]. THIN SOLID FILMS, 1980, 73 (02) : 299 - 307
[5] TEMPERATURE-DEPENDENCE OF ELECTRICAL-CONDUCTIVITY AND HALL-COEFFICIENT IN 2H-MOS2, MOSE2, WSE2, AND MOTE2
ELMAHALAWY, SH
EVANS, BL
[J]. PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 1977, 79 (02): : 713 - 722
[6] OPTICAL ABSORPTION AND DISPERSION INMOLYBDENUM DISULPHIDE
EVANS, BL
YOUNG, PA
[J]. PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1965, 284 (1398): : 402 - &
[7] EVANS BL, 1976, PHYSICS CHEM MATERIA, V4, pCH1
[8] MOBILITY OF CHARGE CARRIERS IN SEMICONDUCTING LAYER STRUCTURES
FIVAZ, R
MOOSER, E
[J]. PHYSICAL REVIEW, 1967, 163 (03): : 743 - &
[9] PHOTO-VOLTAIC EFFECT AND OPTICAL-ABSORPTION IN MOS2
FORTIN, E
SEARS, WM
[J]. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1982, 43 (09) : 881 - 884
[10] PHYSICAL PROPERTIES OF LAYER STRUCTURES - OPTICAL PROPERTIES AND PHOTOCONDUCTIVITY OF THIN CRYSTALS OF MOLYBDENUM DISULPHIDE
FRINDT, RF
YOFFE, AD
[J]. PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1963, 273 (1352) : 69 - +