EFFECT OF V-O BARRIERS IN CR-SI-O/V-O/AL THIN-FILM SYSTEM

被引：3

作者：

BATHER, KH

VOIGTMANN, R

MOLDENHAUER, W

ZIES, G

SCHREIBER, H

机构：

来源：

THIN SOLID FILMS | 1989年 / 177卷

关键词：

D O I：

10.1016/0040-6090(89)90579-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：315 / 332

页数：18

共 40 条

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