PHASE FORMATION IN CR-SI THIN-FILM INTERACTIONS

被引：44

作者：

COLGAN, EG

TSAUR, BY

MAYER, JW

机构：

来源：

APPLIED PHYSICS LETTERS | 1980年 / 37卷 / 10期

关键词：

D O I：

10.1063/1.91767

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：938 / 940

页数：3

共 9 条

[1] KINETICS OF PHASE FORMATION IN AU-AL THIN-FILMS [J].

CAMPISANO, SU ;

FOTI, G ;

RIMINI, E ;

LAU, SS ;

MAYER, JW .

PHILOSOPHICAL MAGAZINE, 1975, 31 (04) :903-917

[2] PHASE-DIAGRAMS AND METAL-RICH SILICIDE FORMATION [J].

CANALI, C ;

MAJNI, G ;

OTTAVIANI, G ;

CELOTTI, G .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (01) :255-258

[3]

CANALI C, 1979, J APP PHYS, V56, P5768

[4]

HANSEN M, 1958, CONSTITUTION BINARY, P68

[5] AUA1 COMPOUND FORMATION BY THIN-FILM INTERACTIONS [J].

MAJNI, G ;

OTTAVIANI, G ;

GALLI, E .

JOURNAL OF CRYSTAL GROWTH, 1979, 47 (04) :583-588

[6] FORMATION KINETICS OF CRSI2 FILMS ON SI SUBSTRATES WITH AND WITHOUT INTERPOSED PD2SI LAYER [J].

OLOWOLAFE, JO ;

NICOLET, MA ;

MAYER, JW .

JOURNAL OF APPLIED PHYSICS, 1976, 47 (12) :5182-5186

[7]

SHUNK FA, 1969, CONSTITUTION BINARY, P280

[8]

TSAUR BY, UNPUBLISHED

[9]

TU KN, 1978, THIN FILMS INTERDIFF, pCH10

← 1 →