AUA1 COMPOUND FORMATION BY THIN-FILM INTERACTIONS

被引:25
作者
MAJNI, G [1 ]
OTTAVIANI, G [1 ]
GALLI, E [1 ]
机构
[1] UNIV MODENA,IST MINERAL,I-41100 MODENA,ITALY
关键词
D O I
10.1016/0022-0248(79)90143-X
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The AuAl compound was obtained by low temperature (190-250°C) heat treatment of a thin gold and aluminium film. The compound was identified by X-ray diffraction and its thickness was measured by 4He MeV ion backscattering. The AuAl layer grows at a fixed temperature as a function of (time) 1 2. The activation energy of the growth compound is 1.2 eV. This compound is stable up to the maximum investigated temperature (≈500°C). © 1979.
引用
收藏
页码:583 / 588
页数:6
相关论文
共 14 条
  • [1] ROLE OF METAL-SEMICONDUCTOR INTERFACE IN SILICON INTEGRATED-CIRCUIT TECHNOLOGY
    ANDREWS, JM
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (06): : 972 - 984
  • [2] KINETICS OF PHASE FORMATION IN AU-AL THIN-FILMS
    CAMPISANO, SU
    FOTI, G
    RIMINI, E
    LAU, SS
    MAYER, JW
    [J]. PHILOSOPHICAL MAGAZINE, 1975, 31 (04): : 903 - 917
  • [3] CAMPISANO SU, THIN FILM PHENOMENA, P129
  • [4] PHASE-DIAGRAMS AND METAL-RICH SILICIDE FORMATION
    CANALI, C
    MAJNI, G
    OTTAVIANI, G
    CELOTTI, G
    [J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (01) : 255 - 258
  • [5] FERRO R, 1966, REND ACCAD NAZ LIN 8, V41, P85
  • [6] FRANCOMBE MH, 1967, THIN SOLID FILMS, V1, P353
  • [7] CRYSTALLINE STRUCTURE OF AUA
    FRANK, K
    SCHUBERT, K
    [J]. JOURNAL OF THE LESS-COMMON METALS, 1970, 22 (03): : 349 - &
  • [8] KIRSCH RG, THIN FILM PHENOMENA, P165
  • [9] THIN-FILMS AND SOLID-PHASE REACTIONS
    MAYER, JW
    POATE, JM
    TU, KN
    [J]. SCIENCE, 1975, 190 (4211) : 228 - 234
  • [10] ANALYSIS OF THIN-FILM STRUCTURES WITH NUCLEAR BACKSCATTERING AND X-RAY-DIFFRACTION
    MAYER, JW
    TU, KN
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (01): : 86 - 93