ANALYSIS OF THIN-FILM STRUCTURES WITH NUCLEAR BACKSCATTERING AND X-RAY-DIFFRACTION

被引：96

作者：

MAYER, JW

TU, KN

机构：

[1] CALTECH,PASADENA,CA 91109

[2] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1974年 / 11卷 / 01期

关键词：

D O I：

10.1116/1.1318668

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：86 / 93

页数：8

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