KINETICS OF INTERMETALLICS TRANSFORMATION IN SPUTTERED CU-IN ALLOYS STUDIED BY ELECTRICAL-RESISTANCE MEASUREMENTS

被引:10
作者
PARRETTA, A
RUBINO, A
机构
[1] ENEA, Centro Ricerche Fotovoltaiche, I-80055 Portici, Napoli
关键词
METALS; THIN FILMS; PHASE TRANSITIONS;
D O I
10.1016/0038-1098(95)00550-1
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Sheet resistance measurements on sputtered Cu-In layers were performed while varying the temperature in a cyclic way between room temperature and 150 degrees C. A hysteresis effect was observed which can be explained by a CuIn2 --> Cu11In9 phase transformation taking place in the alloy during the thermal cycles. A model is proposed for the phase transformation which is based on a diffusional mechanism. It is suggested that simple sheet resistance measurements made in the same system in which the metallic layers are deposited could be used to follow the phase formation and transformation in the alloy.
引用
收藏
页码:767 / 770
页数:4
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