REPRESENTATION OF ION-IMPLANTATION PROFILES BY PEARSON FREQUENCY-DISTRIBUTION CURVES

A method is described whereby ion implantation profiles in amorphous materials may be accurately represented by Pearson frequency distribution curves. The type of Pearson distribution to be used depends upon the implantation conditions but it is shown that the three main types, I, IV and VI, together with the transition types II, III, V, VII and the Gaussian are all suitable representations. Previous attempts to fit Pearson curves to implantation profiles have often failed due to semi-infinite moments being used instead of infinite moments. This approximation is only valid when the surface concentration of implanted ions is negligibly small. © 1990 IOP Publishing Ltd.