SURFACE-MICROMACHINED FREE-SPACE MICRO-OPTICAL SYSTEMS CONTAINING 3-DIMENSIONAL MICROGRATINGS

被引：36

作者：

LEE, SS

LIN, LY

WU, MC

机构：

[1] Electrical Engineering Department, University of California at Los Angeles, Los Angeles

来源：

APPLIED PHYSICS LETTERS | 1995年 / 67卷 / 15期

关键词：

D O I：

10.1063/1.114744

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Free-space micro-optical systems on a chip containing three-dimensional microgratings have been demonstrated using surface-micromachining technique. The micrograting is integrated with a rotary stage, a collimating micro-Fresnel lens, and an edge-emitting laser held by three-dimensional alignment structures on a single Si substrate. Diffraction patterns for various grating rotation angles are observed. Another optical interconnect module consisting of three cascaded microgratings is also demonstrated. The micrograting is a basic building block for many micro-optical systems and is very attractive for applications in microspectrometers, free-space optical interconnect, optoelectronic packaging, and wavelength-division multiplexed integrated micro-optical systems. (C) 1995 American institute of Physics.

引用

页码：2135 / 2137

页数：3

共 12 条

[1]

DANEMAN MJ, 1995, JAN P MEMS 95 AMST, P55

[2]

DENG K, 1995, JAN P MEMS 95 AMST, P368

[3] IC-PROCESSED ELECTROSTATIC MICROMOTORS [J].

FAN, LS ;

TAI, YC ;

MULLER, RS .

SENSORS AND ACTUATORS, 1989, 20 (1-2) :41-47

[4] OPTICAL INTERCONNECTIONS FOR VLSI SYSTEMS [J].

GOODMAN, JW ;

LEONBERGER, FJ ;

KUNG, SY ;

ATHALE, RA .

PROCEEDINGS OF THE IEEE, 1984, 72 (07) :850-866

[5]

LEE SS, 1994, 7TH P LAS EL OPT SOC, P242

[6]

LEE SS, 1994, P IEEE INT ELECTRON, P761

[7] MICRO-MACHINED 3-DIMENSIONAL MICROOPTICS FOR INTEGRATED FREE-SPACE OPTICAL-SYSTEM [J].

LIN, LY ;

LEE, SS ;

PISTER, KSJ ;

WU, MC .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1994, 6 (12) :1445-1447

[8] SELF-ALIGNED HYBRID INTEGRATION OF SEMICONDUCTOR-LASERS WITH MICROMACHINED MICROOPTICS FOR OPTOELECTRONIC PACKAGING [J].

LIN, LY ;

LEE, SS ;

PISTER, KSJ ;

WU, MC .

APPLIED PHYSICS LETTERS, 1995, 66 (22) :2946-2948

[9]

LIN LY, 1994, ELECTRON LETT, V30, P443

[10]

Nishihara H., 1985, OPTICAL INTEGRATED C

← 1 2 →