THE THERMAL-STABILITY OF VERY THIN PD2SI FILMS ON SI

被引:14
作者
TROMP, RM [1 ]
VANLOENEN, EJ [1 ]
IWAMI, M [1 ]
SMEENK, RG [1 ]
SARIS, FW [1 ]
NAVA, F [1 ]
OTTAVIANI, G [1 ]
机构
[1] IST FIS,I-41100 MODENA,ITALY
关键词
D O I
10.1016/S0039-6028(83)80028-4
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
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页码:224 / 236
页数:13
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