ELECTRON DETACHMENT CROSS-SECTIONS IN LOW-ENERGY HEAVY NEGATIVE-ION BEAM APPARATUS

被引：18

作者：

ISHIKAWA, J

TSUJI, H

MAEKAWA, T

机构：

来源：

VACUUM | 1989年 / 39卷 / 11-12期

关键词：

D O I：

10.1016/0042-207X(89)91105-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1127 / 1130

页数：4

共 19 条

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[8] NEUTRAL AND IONIZED ALKALINE METAL BOMBARDMENT TYPE HEAVY NEGATIVE-ION SOURCE (NIABNIS) [J].

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[10] NEGATIVE-ION SOURCE (NIABNIS) AND PREPARATION OF TRANSPARENT CARBON-FILMS BY NEGATIVE CARBON ION-BEAM DEPOSITION [J].

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