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COMPARISON OF INSTRUMENTS FOR MEASURING STEP HEIGHTS AND SURFACE PROFILES

被引：11
作者：
BENNETT, JM
机构：
来源：
APPLIED OPTICS | 1985年 / 24卷 / 22期
关键词：
D O I：
10.1364/AO.24.003766
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：3766 / 3772
页数：7
相关论文
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[2]   PRECISE METHOD FOR MEASURING ABSOLUTE PHASE CHANGE ON REFLECTION [J].
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[3]   STYLUS PROFILING INSTRUMENT FOR MEASURING STATISTICAL PROPERTIES OF SMOOTH OPTICAL-SURFACES [J].
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DANCY, JH .
APPLIED OPTICS, 1981, 20 (10) :1785-1802
[4]  
BENNETT JM, 1985, OPT NEWS, V11, P17
[5]   MEASUREMENT OF SURFACE-TOPOGRAPHY OF MAGNETIC TAPES BY MIRAU INTERFEROMETRY [J].
BHUSHAN, B ;
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KOLIOPOULOS, CL .
APPLIED OPTICS, 1985, 24 (10) :1489-1497
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