HIGH-RESOLUTION ELECTRON-MICROSCOPY STUDIES OF NI SILICIDES FORMED IN LATERAL DIFFUSION COUPLES

被引:3
作者
CHEN, SH
ELGAT, Z
BARBOUR, JC
ZHENG, LR
MAYER, JW
CARTER, CB
机构
[1] Cornell Univ, Dep of Materials, Science & Engineering, Ithaca,, NY, USA, Cornell Univ, Dep of Materials Science & Engineering, Ithaca, NY, USA
关键词
COMPUTER-SIMULATED IMAGES - HREM STUDIES - LATERAL DIFFUSION COUPLES - NICKEL SILICIDES;
D O I
10.1016/0304-3991(85)90147-0
中图分类号
TH742 [显微镜];
学科分类号
摘要
引用
收藏
页码:297 / 303
页数:7
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