ABRASIVE WEAR OF THICK SILICA FILMS PREPARED BY VACUUM EVAPORATION

被引:3
作者
SAKATA, H
AIKAWA, K
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关键词
D O I
10.1007/BF00550824
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:2671 / 2676
页数:6
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