CONDUCTING POLYANILINE - REMOVABLE SEM DISCHARGE LAYER

被引：6

作者：

ANGELOPOULOS, M

SHAW, JM

LECORRE, MA

TISSIER, M

机构：

[1] IBM Research Division T.J. Watson Research Center Yorktown Heights

来源：

MICROELECTRONIC ENGINEERING | 1991年 / 13卷 / 1-4期

关键词：

D O I：

10.1016/0167-9317(91)90144-3

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper we describe a novel method of eliminating charging during the high resolution SEM inspection and dimensional measurements of x-ray and optical masks. A soluble conducting polymer, polyaniline, is spin-coated on the mask and found to prevent charging even at 15 KV. This method is a non-destructive process in contrast to the commonly used technique of metal deposition, since the polymer can be cleanly removed without any damage to the mask.

引用

页码：515 / 518

页数：4