MATRIX ATOMIC LOSSES AND OXYGEN INCORPORATION UNDER RUBY-LASER IRRADIATION OF SILICON IN GASEOUS ATMOSPHERES

被引：19

作者：

BERTI, M

DALLEROSE, LFD

DRIGO, AV

COHEN, C

SIEJKA, J

BENTINI, GG

JANNITTI, E

机构：

[1] UNIV PARIS 07,ECOLE NORMALE SUPER,PHYS SOLIDES GRP,F-75251 PARIS 05,FRANCE

[2] CNR,IST LAB CHIM & TECN MAT ELETTR,I-40126 BOLOGNA,ITALY

[3] CNR,CTR GAS IONIZZATI,I-35100 PADUA,ITALY

[4] MINIST PUBBL ISTRUZ,CONSORZIO INTERUNIV STRUTURA MAT,I-35131 PADOVA,ITALY

来源：

PHYSICAL REVIEW B | 1986年 / 34卷 / 04期

关键词：

D O I：

10.1103/PhysRevB.34.2346

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：2346 / 2359

页数：14

共 39 条

[1] SURFACE RIPPLING INDUCED BY SURFACE-TENSION GRADIENTS DURING LASER SURFACE MELTING AND ALLOYING
ANTHONY, TR
CLINE, HE
[J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (09) : 3888 - 3894
[2] BAERI, 1982, MAT RES SOC S P, V4, P153
[3] BAERI P, 1982, MAT RES SOC S P, V4, P151
[4] Batanov V. A., 1973, Soviet Physics - JETP, V36, P311
[5] BEDZYK MJ, 1982, J VAC SCI TECHNOL, V20, P634, DOI 10.1116/1.571412
[6] BENTINI GG, 1985, ADV SOLID STATE PHYS, V25, P121
[7] BERTI M, 1985, ENERGY BEAM INTERACT, P131
[8] SURFACE TENSION AS THE CAUSE OF BENARD CELLS AND SURFACE DEFORMATION IN A LIQUID FILM
BLOCK, MJ
[J]. NATURE, 1956, 178 (4534) : 650 - 651
[9] Bunkin Tribelski F.V., 1980, SOV PHYS USPEKHI, V23, P105, DOI [DOI 10.1070/PU1980V023N02ABEH004904, 10.1070/PU1980v023n02ABEH004904]
[10] PULSED LASER IRRADIATION OF GAAS UNDER OXYGEN AND SILANE ATMOSPHERE - INCORPORATION, LOSSES, INFLUENCE OF NATIVE OXIDE
COHEN, C
SIEJKA, J
BERTI, M
DRIGO, AV
BENTINI, GG
PRIBAT, D
JANNITTI, E
[J]. JOURNAL OF APPLIED PHYSICS, 1984, 55 (11) : 4081 - 4087