DETERMINING PHOTOTHERMALLY THE THICKNESS OF A BURIED LAYER

被引：32

作者：

BAUMANN, J

TILGNER, R

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 58卷 / 05期

关键词：

D O I：

10.1063/1.336006

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1982 / 1985

页数：4

共 28 条

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