DETERMINING PHOTOTHERMALLY THE THICKNESS OF A BURIED LAYER

被引:32
作者
BAUMANN, J
TILGNER, R
机构
关键词
D O I
10.1063/1.336006
中图分类号
O59 [应用物理学];
学科分类号
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页码:1982 / 1985
页数:4
相关论文
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