HYDROGENATION OF GOLD-RELATED LEVELS IN SILICON BY ELECTROLYTIC DOPING

被引:20
作者
PEARTON, SJ [1 ]
HANSEN, WL [1 ]
HALLER, EE [1 ]
KAHN, JM [1 ]
机构
[1] UNIV CALIF BERKELEY LAWRENCE BERKELEY LAB,BERKELEY,CA 94720
关键词
D O I
10.1063/1.333167
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:1221 / 1223
页数:3
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