A NEW SUBSTRATE AND GATE CURRENT PHENOMENON IN SHORT-CHANNEL LDD AND MINIMUM OVERLAP DEVICES

被引：20

作者：

HUI, J

HSU, FC

MOLL, J

机构：

来源：

关键词：

D O I：

10.1109/EDL.1985.26072

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：135 / 138

页数：4

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[4] Matsumoto Y., 1983, International Electron Devices Meeting 1983. Technical Digest, P392
[5] MULLER, 1977, DEVICE ELECTRONICS I, P249
[6] OGURA S, 1982, DEC IEDM, P718
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OGURA, S
WALKER, WW
SHEPARD, JF
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