FABRICATION OF HIGH-PERFORMANCE LDDFETS WITH OXIDE SIDEWALL-SPACER TECHNOLOGY

被引：100

作者：

TSANG, PJ ^{[1
]}

OGURA, S ^{[1
]}

WALKER, WW ^{[1
]}

SHEPARD, JF ^{[1
]}

CRITCHLOW, DL ^{[1
]}

机构：

[1] IBM CORP, DIV GEN TECHNOL, ESSEX JUNCTION, VT 05452 USA

来源：

关键词：

D O I：

10.1109/T-ED.1982.20748

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：590 / 596

页数：7

共 13 条

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