ANALYSIS OF ION-IMPLANTED SURFACE AND INTERFACE STRUCTURES BY COMPUTER-SIMULATED BACKSCATTERING SPECTRA

被引：17

作者：

KIDO, Y ^{[1
]}

KAKENO, M ^{[1
]}

YAMADA, K ^{[1
]}

KAWAMOTO, J ^{[1
]}

OHSAWA, H ^{[1
]}

KAWAKAMI, T ^{[1
]}

机构：

[1] TOYOTA MOTOR CORP,TOYOTA,AICHI 471,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 58卷 / 08期

关键词：

D O I：

10.1063/1.335854

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3044 / 3051

页数：8

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