EFFECT OF HYDROGEN PLASMA TREATMENT ON TRANSPARENT CONDUCTING OXIDES

被引:611
作者
MAJOR, S
KUMAR, S
BHATNAGAR, M
CHOPRA, KL
机构
关键词
D O I
10.1063/1.97598
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:394 / 396
页数:3
相关论文
共 12 条
[1]   ESCA STUDY OF TERMINATION OF PASSIVATION OF ELEMENTAL METALS [J].
BARR, TL .
JOURNAL OF PHYSICAL CHEMISTRY, 1978, 82 (16) :1801-1810
[2]   INFRARED STUDY OF ZNO SURFACE PROPERTIES .1. HYDROGEN AND DEUTERIUM CHEMISORPTION AT ROOM-TEMPERATURE [J].
BOCCUZZI, F ;
BORELLO, E ;
ZECCHINA, A ;
BOSSI, A ;
CAMIA, M .
JOURNAL OF CATALYSIS, 1978, 51 (02) :150-159
[3]   TRANSPARENT CONDUCTORS - A STATUS REVIEW [J].
CHOPRA, KL ;
MAJOR, S ;
PANDYA, DK .
THIN SOLID FILMS, 1983, 102 (01) :1-46
[4]   THE INFRARED SPECTRUM OF HYDROGEN CHEMISORBED ON ZINC OXIDE [J].
EISCHENS, RP ;
PLISKIN, WA ;
LOW, MJD .
JOURNAL OF CATALYSIS, 1962, 1 (02) :180-191
[5]  
GOPEL W, 1977, SURF SCI, V62, P165, DOI 10.1016/0039-6028(77)90435-6
[6]   ZINC-OXIDE - SURFACE-STRUCTURE, STABILITY, AND MECHANISMS OF SURFACE-REACTIONS [J].
GRUNZE, M ;
HIRSCHWALD, W ;
HOFMANN, D .
JOURNAL OF CRYSTAL GROWTH, 1981, 52 (APR) :241-249
[7]  
HIRSCHWALD W, 1981, CURRENT TOPICS MATER, V7, P143
[8]   DEGRADATION OF ITO FILM IN GLOW-DISCHARGE PLASMA [J].
KUBOI, O .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1981, 20 (11) :L783-L786
[9]   HIGHLY TRANSPARENT AND CONDUCTING INDIUM-DOPED ZINC-OXIDE FILMS BY SPRAY PYROLYSIS [J].
MAJOR, S ;
BANERJEE, A ;
CHOPRA, KL .
THIN SOLID FILMS, 1983, 108 (03) :333-340