HIGH-RESOLUTION SYSTEM FOR PHOTORESPONSE MAPPING OF SEMICONDUCTOR-DEVICES

被引:2
作者
KASPRZAK, LA [1 ]
机构
[1] IBM CORP,SYST PROD DIV,E FISHKILL FACIL,HOPEWELL JUNCTION,NY 12533
关键词
D O I
10.1063/1.1134207
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:257 / 262
页数:6
相关论文
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PHYSICAL REVIEW, 1955, 99 (04) :1151-1155
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HABERER JR, PHOTORESPONSE MAPPIN, P51
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LOFERSKI JJ, 1959, METHODS EXPERIMENTAL, V6, P365
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