<bold>On the preparation of PZT thin films by laser ablation deposition</bold>

被引：12

作者：

WATTS, BE

LECCABUE, F

BOCELLI, G

CALESTANI, G

CALDERON, F

DEMELO, O

GONZALEZ, PP

VIDAL, L

CARRILLO, D

机构：

[1] CNR, CTR STRUCT DIFFRACTOMETRY, I-43100 PARMA, ITALY

[2] UNIV LA HABANA, FAC FIS, HAVANA, CUBA

来源：

MATERIALS LETTERS | 1991年 / 11卷 / 5-7期

关键词：

D O I：

10.1016/0167-577X(91)90077-J

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Polycrystalline Pb(Ti0.48Zr0.52)O3 films were deposited by laser ablation onto glass slides using a Nd:YAG laser. Film thicknesses of 4-8-mu-m were grown. X-ray diffraction indicated that a heat treatment at 450-degrees-C for 6 h is sufficient to recrystallize the perovskite. Scanning electron microscopy reveals that, after this heat treatment, a dense film is obtained with the desired composition.

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页码：183 / 186

页数：4

相关论文

共 20 条

[1] FERROELECTRIC (PB,LA)(ZR,TI)O3 EPITAXIAL THIN-FILMS ON SAPPHIRE GROWN BY RF-PLANAR MAGNETRON SPUTTERING [J].

ADACHI, H ;

MITSUYU, T ;

YAMAZAKI, O ;

WASA, K .

JOURNAL OF APPLIED PHYSICS, 1986, 60 (02) :736-741

[2] X-RAY STUDY OF PZT SOLID-SOLUTIONS NEAR MORPHOTROPIC PHASE-TRANSITION [J].

ARIGUR, P ;

BENGUIGUI, L .

SOLID STATE COMMUNICATIONS, 1974, 15 (06) :1077-1079

[3] PROPERTIES OF PZT SOLID-SOLUTIONS - REPLY [J].

BENGUIGUI, L .

SOLID STATE COMMUNICATIONS, 1976, 19 (10) :979-981

[4] GROWTH OF THIN-FILMS BY LASER-INDUCED EVAPORATION [J].

CHEUNG, JT ;

SANKUR, H .

CRC CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES, 1988, 15 (01) :63-109

[5]

DEY SK, 1990, IN PRESS FERROELECTR, V109

[6] LASER-INDUCED CHEMICAL ETCHING OF CERAMIC PBTI1-XZRXO3 [J].

EYETT, M ;

BAUERLE, D ;

WERSING, W ;

LUBITZ, K ;

THOMANN, H .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1986, 40 (04) :235-239

[7] ELECTRO-OPTIC EFFECTS OF PLZT THIN-FILMS [J].

ISHIDA, M ;

MATSUNAMI, H ;

TANAKA, T .

APPLIED PHYSICS LETTERS, 1977, 31 (07) :433-434

[8] PLZT THIN-FILM WAVEGUIDES [J].

KAWAGUCHI, T ;

ADACHI, H ;

SETSUNE, K ;

YAMAZAKI, O ;

WASA, K .

APPLIED OPTICS, 1984, 23 (13) :2187-2191

[9] RF PLANAR MAGNETRON SPUTTERING AND CHARACTERIZATION OF FERROELECTRIC PB(ZR,TI)O3 FILMS [J].

KRUPANIDHI, SB ;

MAFFEI, N ;

SAYER, M ;

ELASSAL, K .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (11) :6601-6609

[10] METALORGANIC CHEMICAL VAPOR-DEPOSITION OF PBTIO3 THIN-FILMS [J].

KWAK, BS ;

BOYD, EP ;

ERBIL, A .

APPLIED PHYSICS LETTERS, 1988, 53 (18) :1702-1704