LOW-TEMPERATURE GROWTH OF GAN SINGLE-CRYSTAL FILMS USING ELECTRON-CYCLOTRON RESONANCE PLASMA EXCITED METALORGANIC VAPOR-PHASE EPITAXY

被引：13

作者：

ZEMBUTSU, S

SASAKI, T

机构：

来源：

JOURNAL OF CRYSTAL GROWTH | 1986年 / 77卷 / 1-3期

关键词：

D O I：

10.1016/0022-0248(86)90309-X

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

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页码：250 / 256

页数：7

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