HYDROGEN-INDUCED OXIDE SURFACE CHARGING IN PALLADIUM-GATE METAL-OXIDE-SEMICONDUCTOR DEVICES

被引:22
作者
ARMGARTH, M
NYLANDER, C
SVENSSON, C
LUNDSTROM, I
机构
[1] Linkoping Inst of Technology, Lab of, Applied Physics, Linkoping, Swed, Linkoping Inst of Technology, Lab of Applied Physics, Linkoping, Swed
关键词
D O I
10.1063/1.333837
中图分类号
O59 [应用物理学];
学科分类号
摘要
15
引用
收藏
页码:2956 / 2963
页数:8
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