FINE PATTERNS OF POSITIVE-WORKING RESISTS USING A POLYIMIDE LANGMUIR-BLODGETT-FILM SYSTEM

被引：4

作者：

IWAMOTO, M

KASAHARA, S

IRIYAMA, K

NISHIKATA, Y

KAKIMOTO, M

IMAI, Y

机构：

[1] FUJITSU LTD,DIV BASIC PROC DEV,NAKAHARA KU,KAWASAKI 221,JAPAN

[2] JIKEI UNIV,INST MED SCI,DIV BIOCHEM,TOKYO 105,JAPAN

[3] TOKYO INST TECHNOL,DEPT ORGAN & POLYMER MAT,MEGURO KU,TOKYO 152,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1991年 / 30卷 / 2A期

关键词：

LANGMUIR; BLODGETT FILMS; POLYIMIDE; POSITIVE; RESIST; DISILANE; KRF EXCIMER LASER; POSITIVE-WORKING RESIST;

D O I：

10.1143/JJAP.30.L218

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Thermally stable multilayer films of polyimide containing photosensitive disilane unit were applied to KrF excimer laser resists. The multilayer films prepared by the Langmuir-Blodgett technique were found to act as positive working resists with a resolution of 0.25-mu-m lines and spaces.

引用

收藏

页码：L218 / L221

页数：4

相关论文

共 25 条

[1] POLYMERIZED MONO-MOLECULAR LAYERS - A NEW CLASS OF ULTRATHIN RESINS FOR MICROLITHOGRAPHY [J].

BARRAUD, A ;

ROSILIO, C ;

RUAUDELTEIXIER, A .

THIN SOLID FILMS, 1980, 68 (01) :91-98

[2]

BARRAUD A, 1979, SOLID STATE TECH AUG, P120

[3]

BOERS AN, 1983, THIN SOLID FILMS, V99, P323

[4] METALLIC CONDUCTION THROUGH LANGMUIR-BLODGETT-FILMS [J].

COUCH, NR ;

MONTGOMERY, CM ;

JONES, R .

THIN SOLID FILMS, 1986, 135 (02) :173-182

[5] ELECTRON-BEAM RESISTS PRODUCED FROM MONOMER-POLYMER LANGMUIR-BLODGETT FILMS [J].

FARISS, G ;

LANDO, J ;

RICKERT, S .

THIN SOLID FILMS, 1983, 99 (1-3) :305-315

[6] DIRECT PATTERNING AND ELECTRICAL-PROPERTIES OF PHTHALOCYANINES THIN-FILMS PREPARED BY LANGMUIR-BLODGETT AND SPIN CAST TECHNIQUES [J].

FUJIKI, M ;

TABEI, H ;

IMAMURA, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1987, 26 (08) :1224-1229

[7] ELECTRICAL-PROPERTIES OF MIM JUNCTIONS WITH ULTRA-THIN POLYIMIDE LANGMUIR-BLODGETT-FILMS [J].

IWAMOTO, M .

IEEE TRANSACTIONS ON ELECTRICAL INSULATION, 1990, 25 (03) :541-548

[8] ELECTRICAL-PROPERTIES OF POLYIMIDE LANGMUIR-BLODGETT FILMS SANDWICHED BETWEEN SUPERCONDUCTING ELECTRODES - DETECTION OF MICROWAVES [J].

IWAMOTO, M ;

KUBOTA, T ;

SEKINE, M .

THIN SOLID FILMS, 1989, 180 :185-192

[9] ELECTRICAL-PROPERTIES OF POLYIMIDE LANGMUIR-BLODGETT-FILMS DEPOSITED ON NOBLE-METAL ELECTRODES [J].

IWAMOTO, M ;

KUBOTA, T ;

SEKINE, M .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1990, 23 (05) :575-580

[10]

IWAMOTO M, 1990, POLYMERS MICROELECTR, P749