APPLICATION OF THERMODYNAMICS TO THE EXAMINATION OF THE DIAMOND CVD PROCESS FROM HYDROCARBON HYDROGEN MIXTURES

被引:29
作者
PIEKARCZYK, W
ROY, R
MESSIER, R
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关键词
D O I
10.1016/0022-0248(89)90316-3
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
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页码:765 / 776
页数:12
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