APPLICATION OF THERMODYNAMICS TO THE EXAMINATION OF THE DIAMOND CVD PROCESS FROM HYDROCARBON HYDROGEN MIXTURES

被引:29
作者
PIEKARCZYK, W
ROY, R
MESSIER, R
机构
关键词
D O I
10.1016/0022-0248(89)90316-3
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
引用
收藏
页码:765 / 776
页数:12
相关论文
共 43 条
[11]   THERMODYNAMICS STUDIES OF HIGH TEMPERATURE EQUILIBRIA .3. SOLGAS, A COMPUTER PROGRAM FOR CALCULATING COMPOSITION AND HEAT CONDITION OF AN EQUILIBRIUM MIXTURE [J].
ERIKSSON, G .
ACTA CHEMICA SCANDINAVICA, 1971, 25 (07) :2651-&
[12]  
Faktor M.M., 1974, GROWTH CRYSTALS VAPO
[13]  
FEDOSEEV DV, 1984, USP KHIM+, V53, P753
[14]  
FEDOSEEV DV, 1984, RUSS CHEM REV, V53, P435
[15]  
Glushko V.P., 1978, THERMODYNAMIC PROPER, VI
[16]  
GLUSHKO VP, 1979, THERMODYNAMIC PROPER, V2
[17]  
Hartnett TM, 1988, THESIS PENNSYLVANIA
[18]  
INSPEKTOR A, 1989, IN PRESS MAY EL SOC
[19]   EPITAXIAL-GROWTH OF DIAMOND ON DIAMOND SUBSTRATE BY PLASMA ASSISTED CVD [J].
KAMO, M ;
YURIMOTO, H ;
SATO, Y .
APPLIED SURFACE SCIENCE, 1988, 33-4 :553-560
[20]  
KAMO M, 1987, 8TH P INT S PLAS CHE, V1, P2481