PRODUCTION AND CHARACTERIZATION OF BORON-NITRIDE FILMS OBTAINED BY RF MAGNETRON SPUTTERING AND REACTIVE ION-BEAM-ASSISTED DEPOSITION

被引：4

作者：

ELENA, M ^{[1
]}

GUZMAN, L ^{[1
]}

GIALANELLA, S ^{[1
]}

机构：

[1] UNIV TRENTO,DIPARTIMENTO INGN,I-38100 TRENTO,ITALY

来源：

关键词：

D O I：

10.1016/0257-8972(88)90150-8

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Tungsten Carbide

引用

页码：199 / 206

页数：8

共 6 条

[1]

DAVIS LE, 1978, HDB AUGER ELECTRON S

[2] ION-IMPLANTATION AND ION ASSISTED COATING OF METALS [J].

DEARNALEY, G ;

GOODE, PD ;

MINTER, FJ ;

PEACOCK, AT ;

WADDELL, CN .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06) :2684-2689

MARGESIN, B ;

GIACOMOZZI, F ;

GUZMAN, L ;

LAZZARI, G ;

ZANINI, V .

[4]

RABINOWICZ E, 1965, FRICTION WEAR MATERI, P82

[5]

WEISSMANTEL C, 1986, VIDE, V41, P45

[6]

WEISSMANTEL C, 1987, VIDE COUCHES MINCE S, V237, P44